KOREA SINTO CO., LTD

한국어
English
Sinto Group
  • Headquarters / Mechanical
    • Tel. +82-53-615-4901
    • FAX. +82-53-615-4901
  • SHOTBALL
    • Tel. +82-53-615-4901
    • FAX. +82-53-615-2119

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Problem Solving

Surface Treatment

  • Gear Peening
  • Airblasting Equipment for Hydraulic valve
  • Blast cleaning system for coiled wire, rod and deformed bar
  • MICROBLAST
Advantages of electrostatic chucks on semiconductor manufacturing lines
Type Electrostatic Scale Major pretense
Atmospheric adsorption ○ ○
Vacuum adsorption ◎ X
Adsorption of materials with holes ○ △
Responsiveness △ ◎
NOISE ◎ X
Power consumption ◎ ㅅ
Pricing △ ○
adsorption mark ◎ no remainder △ easy to remain
Compatibility with Work △ Select shape and surface condition ○ 形状・表面状態に左右されにくい
Process changes to match workpiece size ○ Not required in principle △ Necessary in principle
source of power Electrostatic chuck control power supply compressor
Comprehensive assessment ○ △
Comparison of electrostatic chuck surface processing methods
Description of processing method Strength Weakness Assessment
etching process Wet etching 2mm thickness, minimum hole diameter 3mm
  • Dissolution with chemicals takes time due to high chemical
  • ResistanceReverse taper shape
  • Large tip diameter
 △
machining grinding Good shape accuracy due to machining

Time-consuming setup for positioning and adjustment of each chuck, and for processing large areas

 X
blast

Brittle fracture processing by air jetting fine abrasive grains of 10μm to 70μm at high speed

Uniform machining of large areas Masking to ensure dimensional accuracy

 Inability to deal with non-brittle materials ◎
Manufacturing process of Electrostatic Chuck
Material
Dispersing
Laminate
printing
Baking
Outer
shaping
Laminating
Exposure
Developing
BLASTING
Cleaning
Inspection
Shipment
  • Lamination
    Dry film is applied to the product using a dry film resist laminator as in the conventional photo process.
  • Blasting
    Blasting process is performed according to the molding pattern.
  • Exposure
    UV light is irradiated by an exposure machine with a pattern mask set.
  • Cleaning
    Removes projectile materials adhering to the product.
  • Developing
    Develops areas that have not been cured by high-pressure mist developing process exposure of dry film for air blasting, and removes the film.
  • Inspection
    Perform high-precision shape inspection and depth inspection